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IEEE Transactions on Semiconductor Manufacturing > 2017 > 30 > 3 > 216 - 226
IEEE Transactions on Semiconductor Manufacturing > 2008 > 21 > 1 > 46 - 54
IEEE Transactions on Semiconductor Manufacturing > 2017 > 30 > 3 > 216 - 226
IEEE Transactions on Semiconductor Manufacturing > 2008 > 21 > 1 > 46 - 54