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Silicon nanowire (SNW) field-effect transistors (FETs) have proven an emerging highly sensitive bio/chemical sensor due to their huge surface-to-volume ratios. However, fabrication of SNWs with both high output and low cost is still challenging. This paper presents a new fabrication method using sidewall mask technology. By depositing a conformal thin film on a sacrificial pattern and removing the...
This work investigates the physical and sensing properties of high-k Yb2O3 sensing thin films deposited on Si substrate by means of reactive sputtering. The Yb2O3 EIS device annealed at 800??C exhibited a high sensitivity of 55.5 mV/pH, a small hysteresis voltage of 3.76 mV, and a low drift rate. This can be explained by the well-crystallized Yb2O3 structure, a thinner silica layer, and a larger surface...
pH sensitivity of protein mediated gold nanocrystals modified SiO2 have been investigated using a capacitive EIS (electrolyte-insulator-semiconductor) structure and compared with bare SiO2. The SiO2 surface was first silanized using phenyltriethoxy and then a chaperonin protein array was formed on SiO2 surface. Finally, the chaperonin protein lattice is used to deposit gold nanocrystal on SiO2 surface...
Study on Ion Sensitive Field Effect Transistor (ISFET) based on multi-finger gate design is presented. Mf-ISFET was fabricated by using commercial submicron 1.0 mum CMOS technology and deposited with PECVD Si3N4 as a sensing membrane. The electrical data such as IdVd and IdVg of ISFET are measured to identify the behaviours of ISFET. Furthermore, the evaluation test on ISFET performance such as transient...
The pH-sensitive properties of field-effect capacitive electrolyte-diamond-insulator- semiconductor (EDIS) sensors with undoped nanocrystalline diamond (NCD) thin films (100-500 nm) having hydrogen (H)- and oxygen (O)-terminated surfaces have been investigated. The NCD films were grown on p-Si-SiO2 substrates by a microwave plasma-enhanced chemical vapour deposition from a mixture of methane and hydrogen...
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