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The paper discusses the recent achievements in the development of chips with integrated sensing of biomolecules. In particular, it focuses on integrated sensing electrodes on silicon and presents innovative solutions for the enhanced robustness of the electrodes towards cleaning processes and electrolytes. In this study, a microfabrication technology for 3D-integrated disposable chip layers that enables...
We describe the design of a 4times4 active sensor array for multiplexed electrochemical biomolecular detection in a 0.25-mum-CMOS process. Integrated potentiostats sense the current flowing through the on-chip Au electrodes that result from reactions occurring at the chip surface. Preliminary experimental results include cyclic voltammetry of several redox species and application to DNA probe coverage...
An array of 24 times 16 electrochemical sensors for detecting bio-molecules uses gold sensor electrodes added to a 0.5 mum CMOS process. Detection is based on time-resolved measurement of charge (chronocoulometry). A differential measurement technique uses a replica electrode and fast integration to suppress background offset signals
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