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We report data on the relative EBSD grain sizes for HWCVD a-Si:H films which have been sub-threshold laser illuminated prior to thermal annealing compared to films which have undergone no prior laser processing. For laser processed and thermally annealed films which exhibit a reduced incubation period τo, the EBSD grain sizes are not changed compared to those for the same film which is annealed directly...
Hydrogenated silicon (Si:H) thin films were deposited at a selected argon diluting ratio under varied RF power density and the influence of it on nanocrystallization was studied by XRD, FTIR and Raman spectroscopy.
Indium tin oxide (ITO) films were deposited via atmospheric-pressure plasma-enhanced chemical vapor deposition (APPD) using indium acetylacetonate, indium trifluoroacetylacetonate and tin trifluoroacetylacetonate as metal-organic precursors. A film growth temperature of 300??C gave highly-transparent films with modest conductivity. Post-deposition thermal treatments gave ITO films with resistivities...
In our previous study, we fabricates large grain low temperature poly-crystalline silicon film by aluminum induced crystallization (AIC) method. The fabrication process is to deposite aluminum layer on top of the a-Si:H film deposited by plasma enhanced chemical vapor deposition (PECVD) [1]. In this paper, we discussed more about the effect of different aluminum thickness of the AIC process. Five...
The effect of the ZnO homo-buffer layer on the structural, optical and electrical properties of the Sol-gel ZnO films was systematically investigated. The XRD and SEM results show that the homo-buffer layer can improve the degree of the preferential c-axis orientation (the best Lotering orientation factor (F) can reach 0.915), the grain size and the surface morphology of thereon ZnO films. A narrower...
Organic and Inorganic materials with copper (II) phthalocyanine (CuPc) and selenium (Se) were deposited to implement hybrid thin films by multi pocket electron beam evaporation technique. Crystallization of hybrid films was performed by X-ray diffraction (XRD) spectroscopy. XRD pattern exhibits monoclinic alpha-phase crystallizations structure of CuPc. Influences of the CuPc thickness on the crystalline...
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