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Journal of Microelectromechanical Systems > 2012 > 21 > 1 > 181 - 189
Journal of Microelectromechanical Systems > 2008 > 17 > 1 > 166 - 174
Journal of Microelectromechanical Systems > 2008 > 17 > 6 > 1315 - 1321
Journal of Microelectromechanical Systems > 2012 > 21 > 1 > 181 - 189
Journal of Microelectromechanical Systems > 2008 > 17 > 1 > 166 - 174
Journal of Microelectromechanical Systems > 2008 > 17 > 6 > 1315 - 1321