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Journal of Microelectromechanical Systems > 2010 > 19 > 5 > 1079 - 1087
Journal of Microelectromechanical Systems > 2010 > 19 > 2 > 396 - 401
Journal of Microelectromechanical Systems > 2008 > 17 > 5 > 1195 - 1203
Journal of Microelectromechanical Systems > 2010 > 19 > 5 > 1079 - 1087
Journal of Microelectromechanical Systems > 2010 > 19 > 2 > 396 - 401
Journal of Microelectromechanical Systems > 2008 > 17 > 5 > 1195 - 1203