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We have proposed the intelligent Si neural probe system which can realize high density and multifunctional recording of neuronal behaviors. In this device, LSI chips such as amplifiers, A/D converters, and multiplexers are integrated on the intelligent Si neural probe. In this paper, we report the development of a novel Si neural probe with microfluidic channels which is the key part of the intelligent...
An integrated pressure/flow sensor using a direct UV written planar Bragg grating situated inside a flexible diaphragm of thickness 200 mum has been fabricated. The diaphragm is created by etching away the underlying silicon support.
In this paper, we present five designs of microchannel fluidic cooling structures formed on a Si chip representing the heat source. The numerical simulation is performed by the software package of COMSOL multiphysics, formerly FEMLAB. The fabrication process of the microchannel structure will also be discussed.
Microchannel are very important for microfluidic devices because they carry liquid or fluid quantities, aiming to realize biochemical micro reactions, IC cooling, etc. The most of microfluidic devices used until now bulk micromachining technologies to fabricate microchannels, microchambers, involving high temperature bonding processes. So, the material cost is enough expensive because one extra wafer...
Commonly, microelectrodes used in microfluidics are made from copper, Au or Pt. They are difficult to fabricate and the cost is relatively high. Thus, we designed and fabricated a novel microelectrode made from silicon for it is cheap and easy to fabricate. It has been proven that cells can be manipulated by dielectrophoresis force producing on interdigitated electrodes. In addition, the direction...
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