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physica status solidi c > 9 > 6 > 1356 - 1360
IEEE Transactions on Semiconductor Manufacturing > 2011 > 24 > 2 > 139 - 144
physica status solidi c > 9 > 6 > 1356 - 1360
IEEE Transactions on Semiconductor Manufacturing > 2011 > 24 > 2 > 139 - 144