The Infona portal uses cookies, i.e. strings of text saved by a browser on the user's device. The portal can access those files and use them to remember the user's data, such as their chosen settings (screen view, interface language, etc.), or their login data. By using the Infona portal the user accepts automatic saving and using this information for portal operation purposes. More information on the subject can be found in the Privacy Policy and Terms of Service. By closing this window the user confirms that they have read the information on cookie usage, and they accept the privacy policy and the way cookies are used by the portal. You can change the cookie settings in your browser.
A novel all-silicon thermal independent Mach-Zehnder interferometer consisting of two multimode waveguide arms having equal lengths and widths but transmitting different modes is proposed and experimentally demonstrated. The interferometer has a temperature sensitivity smaller than 8pm/°C in a wavelength range of 18nm.
The present article reports on experimental measurements aimed at assessing general theoretical expressions of temperature coefficients in the case of crystalline silicon solar cells. The relevance of a recently proposed relation between the temperature dependence of open circuit voltage and the external radiative efficiency of photovoltaic devices is demonstrated. Unusual temperature sensitivities...
In this paper we present a study on an ultra-low noise cavity-stabilized-laser developed at the laboratory. The project aims to realize an ultra-stable cavity with a flicker frequency noise floor expected to be at ∼ 4×10−17. This level of frequency noise can be achieved by making the cavity from a high mechanical quality factor material: single crystal silicon. The cavity needs to be cooled down to...
The paper presents a piezoresistive absolute micro-pressure sensor for altimetry. This investigation includes the design, fabrication and testing of the sensor. An improved structure is studied through incorporating sensitive beams into the bossed-diaphragm structure. By analyzing the stress distribution of sensitive elements using finite element method (FEM), the configuration shows an enhanced sensitivity...
This paper presents a model of the electrical transport in MIS structure of metal — thin nanoporous silicon-p-Si. The obtained analytical expressions allow analyzing the contribution of the porous silicon and surface electronic states to the electrical behavior of the structure at gas adsorption. The parameters of surface electronic states for different porous silicon thickness are obtained from analysis...
Presented is a piezoresistive absolute micro-pressure sensor, which features relatively high sensitivity and overload resistance simultaneously. In this investigation, the design, fabrication and testing of the sensor are carried out. By analyzing the stress distribution on sensitive elements using the finite-element method (FEM), an improved structure through introduction of sensitive beams and islands...
A model for the electrical behavior of pn-junction diodes biased in forward direction and used as a temperature sensitive device (TSD) in microbolometers is presented. It is based on the well-known Shockley equation extended by the ideality factor m. We demonstrate that the largest temperature sensitivity can be reached for diodes at low current density operation featuring a high ideality factor m...
The MEMS Si thermal convective inclinometer without solid proof mass has many advantages such as more robust and immune to vibration shocks compared with traditional inclinometer. In this paper, a 3D parametric model of this kind of inclinometer has been setup. The influences of different airflow velocity under high environmental temperature have also been considered to study how they affect the sensitivity...
In this paper, intermediate-sized porous silicon (PS) sensing material was prepared via galvanostatic electrochemical anodization technique in a Teflon double-tank cell configuration. Then, tungsten oxide (WO3) thin films were deposited onto the PS surface by using DC reactive magnetron sputtering method. The morphology of PS and WO3/PS were observed by field emission scanning electron microscope...
We describe the fabrication of a double-layer silicon photonic crystal using self-aligned CMOS-compatible processes and its assembly on a single mode fiber using a wafer template and epoxy bonding. The fiber sensor has sharper resonances and higher temperature sensitivity than the previously-reported single-layer sensor. The new assembly method facilitates batch-production of the sensor and allows...
The piezoresistive pressure sensor has been used to measure the dynamic pressure as well as in high temperature environment. In this paper, a novel TSV 3D packaged pressure sensor is proposed for high temperature environment and dynamic measurement. The pressure sensors and the silicon carrier with TSV are flip chip bonded using Au/Sn eutectic for hermetic encapsulation. In order to reduce the stress...
We investigate theoretically and experimentally temperature sensors based on asymmetric Fano resonances in integrated silicon Bragg reflectors. A temperature sensitivity of 77pm/°C can be achieved due to thermo-optic effect of silicon.
A high sensitivity photonic temperature sensor based on silicon eye-like microring resonator system (EMRS) is reported. The results show great enhancement of the sensing performance by using the EMRS configuration.
This paper presents a fully integrated Hall sensor microsystem with a current-mode output. The system operates in open-loop and includes a Hall sensor with internal biasing, a fully differential front-end, a preamplifier chain and a voltage-to-current converter (V-I). The effects of the V-I block on the sensitivity drift of the system are analyzed and a current biasing of the Hall cells is proposed...
Several Hall sensor configurations have been integrated in CMOS technology and analyzed in terms of offset at room temperature and offset drift. We looked for the best geometry that would minimize the offset and its drift. The targeted specification was ±30 µT for offset at room temperature and ±0.3 µT/°C for the drift. The measurement setup developed allows a clean, reliable and fast analysis of...
In this study, the ruthenium dioxide (RuO2) thin film was deposited on silicon (Si) substrate by radio frequency (R. F.) sputtering system. In order to optimize the sensing property of the chloride ion sensing device, the chloride ion selective membrane was prepared on sensing window of Si/RuO2 sensing device by dropping and spin coating methods, respectively. Furthermore, the chloride ion selective...
125µm- breath sensor with high sensitivity and rapid response was prepared by using n-type Si: Au material. Its sensitivity coefficient and time constant were 4 V.sec/L and 38 msec, respectively. Its working principle was based on anomalous resistance effect, which not only increased the sensitivity, but also reduced its time constant greatly. Its signal processing system can select the breath signals...
This paper demonstrates a dual-mode, micromachined temperature and relative humidity (RH) sensor platform using two ZnO-on-silicon, lateral-mode bulk acoustic wave (BAW) resonators. A moisture-insensitive reference resonator is utilized in conjunction with an identical, humidity functionalized resonator to yield a thermally compensated RH sensor. The reference sensor exploits the dual-mode response...
Two new preconcentrator based measurement systems for ethylene gas concentration in the ppbv range for the fruit logistic industry have been developed and examined. Two different detection principles have been applied: non dispersive infrared (NDIR)-detection and gas chromatography. A silicon based miniaturized gas chromatographic column was combined with a miniaturized silicon preconcentrator and...
To reduce fuel gas consumption, a planar counter-current micro flame ionization detector (μFID) has been developed for mobile applications. In this work, the effect of flame chamber size on the μFID sensitivity is investigated. An FEM model is presented, which predicts sensitivity. The model shows that smaller chambers result in more confined flammable mixtures. Flame observations...
Set the date range to filter the displayed results. You can set a starting date, ending date or both. You can enter the dates manually or choose them from the calendar.