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A model for the electrical behavior of pn-junction diodes biased in forward direction and used as a temperature sensitive device (TSD) in microbolometers is presented. It is based on the well-known Shockley equation extended by the ideality factor m. We demonstrate that the largest temperature sensitivity can be reached for diodes at low current density operation featuring a high ideality factor m...
The MEMS Si thermal convective inclinometer without solid proof mass has many advantages such as more robust and immune to vibration shocks compared with traditional inclinometer. In this paper, a 3D parametric model of this kind of inclinometer has been setup. The influences of different airflow velocity under high environmental temperature have also been considered to study how they affect the sensitivity...
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