The Infona portal uses cookies, i.e. strings of text saved by a browser on the user's device. The portal can access those files and use them to remember the user's data, such as their chosen settings (screen view, interface language, etc.), or their login data. By using the Infona portal the user accepts automatic saving and using this information for portal operation purposes. More information on the subject can be found in the Privacy Policy and Terms of Service. By closing this window the user confirms that they have read the information on cookie usage, and they accept the privacy policy and the way cookies are used by the portal. You can change the cookie settings in your browser.
For the first time, this paper highlights the dependence of amplitude ratio on the drive power in mode localized sensors. The simulation and experimental results show that the amplitude ratio measurements are least sensitive to drive power variations in the veering zone (where the two resonators are matched in stiffness and mass). This observation is a potential pathway to high resolution long term...
In this paper, the amplitude and frequency stability of a mode-localized sensor are characterized in a closed loop setup. The system describes an absolute amplitude ratio sensitivity of 5250 to stiffness perturbations in linear operation. A stability of 432ppm at 500s integration time is observed for amplitude ratio measurements. A resolution of 85ppb corresponding to normalised stiffness perturbations...
The resonance frequencies (eigenvalues) and amplitudes (eigenvectors) of coupled micro/nano-resonator arrays are used in sensors to measure applied physical perturbations such as mass. A higher sensitivity is obtained by measuring amplitude changes rather than frequency variations corresponding to identical perturbations. In this paper we present a new technique by measuring the difference of displacement...
The use of vibration mode localization in arrays of mechanically-coupled, nearly identical beam-shaped resonators has been studied for ultra-sensitive mass detection. In this paper, for the first time, we thoroughly summarized and compared different sensitivities of various cantilever structures on mass sensing. Meanwhile, from our analytical results, the expression of the highest sensitivity has...
Micromachined resonant sensors have been researched for several decades for a variety of applications with potential benefits in terms of improved sensitivity and scalability relative to other transduction principles. Conventional implementations usually involve detection elements monitoring resonant frequency and/or dissipation shift in a single degree-of-freedom or several independent degrees-of-freedom...
In this work, a 1.2-MHz CMOS-MEMS DETF (double-ended tuning fork) resonator with its on-chip tunable transimpedance amplifier (TIA) is designed to measure the ring-down response of the resonator circuit for pressure sensing applications. From the time-domain ring-down waveform, the frequency and quality factor of the resonator circuit can be extracted corresponding to its environmental pressure. Due...
This work presents the first fabricated and characterized MEMS in polycrystalline silicon-germanium (poly-SiGe) for biosensing applications. The devices, clamped-clamped microresonators, combine the possibility of above-IC MEMS-CMOS integration with a stiction-free design that enables biomolecule mass sensing in air. By perforating the resonant beam with square or hexagonal holes, a higher surface-to-volume...
Resonating sensors are used for measurement tasks in a wide range of applications. Depending on sensor type and operating conditions, the signals of these sensors are of ten afflicted with unwanted components induced by parasitic sensor effects or the implemented sensor interface. Especially when using digitizing interface circuits it can be advantageous concerning the utilizable resolution of the...
A novel moisture insensitive mass flow detector based on a mass flow sensor with open an cylindrical resonator is presented in this paper. The mass flow sensor consists of two MicroStrip Patch couplers integrated in a Composite Right-/Lefthanded Transmission line resonator. The design of a particulate mass flow detector based on this sensor is given and the algorithm to detect the average solids concentration...
This work presents thermally actuated MEMS resonators specifically designed for mass measurement of air-borne particles and experimental measurement of resonators' mass sensitivity. The resonators have resonant frequencies in the few hundreds of kHz to a few MHz and despite their relatively low frequencies exhibit high quality factors (Q) (a few thousands) under atmospheric pressure. The fabricated...
A silicon microcantilever based mass sensor with picogram resolution has been fabricated. In order to improve its sensitivity value, resonator dimensions were reduced. Working in dynamic mode, the cantileverpsilas resonance frequency depends on the stiffness of the spring and the attached mass. Therefore, maintaining constant stiffness and monitoring resonance frequency shift of the cantilever, the...
For the purpose of measuring the viscosity of complex structured liquids, a novel type of resonator is employed. A metallic frame with a spring-mounted plate in its center is placed in a magnetic field exhibiting a constant and a superposed sinusoidal component. This way, a dominant in-plane motion is excited. The numerical analysis of the frequency response shows a useable viscosity range up to approx...
Set the date range to filter the displayed results. You can set a starting date, ending date or both. You can enter the dates manually or choose them from the calendar.