The Infona portal uses cookies, i.e. strings of text saved by a browser on the user's device. The portal can access those files and use them to remember the user's data, such as their chosen settings (screen view, interface language, etc.), or their login data. By using the Infona portal the user accepts automatic saving and using this information for portal operation purposes. More information on the subject can be found in the Privacy Policy and Terms of Service. By closing this window the user confirms that they have read the information on cookie usage, and they accept the privacy policy and the way cookies are used by the portal. You can change the cookie settings in your browser.
Residual stress of sol-gel derived lead-zirconatetitanate (PZT) films was investigated under modified preparation conditions to realize buckled diaphragm structures for highly sensitive ultrasonic microsensors. As the modifications of the sol-gel process, pyrolysis temperature was varied from 250°C to 400°C, and the timing of crystallization annealing was modified in the multi-coating steps; with...
A technique which retains wafer-scale processing and packaging compatibility is described for customizing the dynamics of individual silicon resonators. The approach uses laser ablation of a protective conformal layer (parylene) to expose silicon in regions that are targeted for mass removal by subsequent DRIE. The technique is demonstrated on a planar axisymmetric resonator design whereby the frequency...
The design, manufacturing and calibration of an improved miniaturized two axis sun sensor for satellite attitude control will be shown. The high precision is obtained by the subdivision of the field of view (FOV). The FOV and the resolution obtained are ±60° and 0.5° for the coarse measure and ±6° with precision better than 0.05° for the fine measure.
We have developed a microsensor using a suspended microbridge and a carbon nanotube networks (CNN) that is in-situ synthesized on the microbridge for detection of trace energetic substances. The energetic substance vapors are adsorbed onto the CNN surfaces and are heated to micro deflagration using an integrated heater on the microbridge. The involved temperature changes are measured with an integrated...
The purpose of this paper is to present a new material concept to develop highly sensitive three-dimensional tactile force sensors. Conventional three-dimensional force sensors are based on silicon with integrated diffused silicon piezoresistors. Micromechanical force sensors using a soft material instead, e. g. SU-8 resist, would be more sensitive for static deflection measurements. As a characteristic...
This paper describes the modeling of a silicon piezoresistive pressure microsensor. The main feature involved in the design of a pressure sensor is the sensitivity. Here, the sensor sensitivity was related to the ratio between width and thickness of the diaphragm. The sensor was designed by an analytical solution. The diaphragm was considered a thin plate and the piezoresistors are arranged in the...
An analytical method is developed to determine the frequency response of thermal microsensors on various input actions. The method has the following algorithm. In a microsensor, the domain of modelling is marked out. This domain is divided into the regions with homogeneous parameters. For each region the non-steady-state heat conduction equation is obtained that is solved by means of the time Fourier...
This paper shows the design and fabrication of a miniaturized two-axis sun sensor for satellite attitude control, using a CMOS standard technology. The high precision will be obtained by the subdivision of field of view (FOV). A sun FOV of ±60 ° and a resolution of 0.1° will be expected.
We developed a new type of a microcantilever biosensor resonating at the interface between air and liquid. The cantilever sensor has advantages in high signal-to-noise ratio (SNR) and high quality factor (Q-factor) for detecting bio-reactions because liquid damping acts on only one-side, and because there is no obstacle between detection, excitation lasers and the cantilever. (Fig. 1 (c)) Using the...
A mass sensor innovative concept is presented here, based on a hollow plate MEMS resonator (Fig. 1). This approach consists in flowing a solution through the embedded nanochannel, while the plate resonator is actuated by electrostatic coupling in dry environment. The experimental results have shown a clear relationship between measured shift of the resonant frequency and the sample solution density...
We report detailed characterization of a vacuum sealed angle measuring silicon MEMS gyroscope. The new gyroscope utilizes completely symmetric, dynamically balanced quadruple mass architecture, which provides a unique combination of maximized quality (Q) factors and isotropy of both the resonant frequency and the damping. The vacuum sealed SOI prototype with a 2 kHz operational frequency demonstrated...
Miniature interferometer with a maximum resolution of approximately 2 cm-1 which consists of the rotary comb drive actuator, three-dimensional corner cube mirrors, beam splitter and capacitive displacement sensor. The total size of the interferometer is approximately 8 × 8 mm2. The displacement of the corner cube mirror has approximately 650 μm when a voltage of 180 V is applied and this displacement...
A novel micromachined thermopile IR detector module with filter and detector cointegrated by wafer level Au-Au vacuum bonding is presented in this paper. Filter is directly bonded on the IR detector to miniaturize the detector module, as well as reduce the packaging cost. Because the gas convection will be eliminated in vacuum, a better thermal isolation can be achieved for the vacuum packaged IR...
In order to make the location of separation point of the boundary layer of the air flow measurements easier and more accurate, a very small sensor array has been constructed. MEMS play an important role for studying gaseous or liquid fluid flows experimentally due to device dimensions on the μm-scale. Based on the well-established principle of thermal anemometry, an array of hot-film anemometers on...
This paper discusses the design and realization of a micromachined micro Coriolis flow sensor with integrated electrodes for both electrostatic actuation and capacitive readout. The sensor was realized using semicircular channels just beneath the surface of the silicon wafer. The channels have thin silicon nitride walls to minimize the channel mass with respect to the mass of the moving fluid. A comb-shaped...
We propose an out-of-plane high-aspect-ratio temperature sensitive “whisker-like” microwire array for use in multisite temperature detection with a high spatial resolution. This sensor is based on vertically assembled force sensitive p-type (p-) silicon microwires on an n-type silicon substrate, which resulted in a p-silicon wire/p-n diode system array. The shift in the rectifying current-voltage...
This paper describes an implantable microsystem being developed to continuously monitor intraocular pressure. The glass-in-silicon reflow process allows the formation of an embedded cavity and a variety of device shapes. A 0.18μm CMOS circuit fits within the cavity and uses vertical feedthroughs in the glass to interface with other components. An optical trigger wakes up the IC to take data, reducing...
A new MEMS accelerometer with low range is designed based on traditional bilateral four Beam micro accelerometer, measuring range is ±10g. Using the ANSYS finite element software to model the accelerometer structure firstly, and then to analysis stress "modal and impact ability". The theoretical sensitivity of the accelerometer reaches 1.029mV/g when the supply voltage is 5V, compared to...
We have developed a silane-free atmospheric-pressure plasma Si deposition process and investigated the properties of the deposited films by fabricating strain gauge type pressure sensors for the first time. The Si deposition process, which is known as plasma-enhanced chemical transport, utilizes the temperature difference between the solid Si source and the substrate in atmospheric hydrogen plasma...
This paper presents the design and implementation of a resonator-type high-resolution gravimetric sensor, which allows detection in liquid media without severe degradation of the quality factor and the resolution. The proposed system eliminates the drawbacks of traditional cantilever-based detectors by lateral motion of the mechanical structure, which significantly decreases squeeze-film damping....
Set the date range to filter the displayed results. You can set a starting date, ending date or both. You can enter the dates manually or choose them from the calendar.