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This paper investigates the use of transient infrared thermography in a transmission mode for subsurface defect detection within thin multilayer structures such as those found in MEMS devices. This was undertaken through the use of finite element analysis based simulations for several sizes of defects and for several combinations of substrate and thin film materials. The maximum temperature difference...
Based on the thermal properties of quantum dots, a novel method for bearing cage temperature measurement is proposed in this paper. Firstly, the synthesis of quantum dots is briefly introduced, and the composited film by DDA polyelectrolyte-CdTe quantum dots for temperature sensor is prepared according to the layer-by-layer self-assembly method. Then the linear reversible change of CdTe quantum dots...
On-chip integration of quartz resonators with Si devices opens new opportunities for microsystem miniaturization and enhanced performance. In addition to integrating with electronics, the integration of piezoelectric quartz resonators with other sensors of different material composition is also possible. In this paper, we demonstrate that a VHF SC-cut quartz resonator can be integrated within a high-aspect-ratio...
This work presents a passive resonant micro-electromechanical phase detector (PD). The PD structure is comprised of two thin film piezoelectric on silicon (TPoS) resonator plates coupled by a silicon beam in the middle. The device exhibits a width extensional resonance mode in which resonant plates vibrate out of phase. When actuated in this mode, the interference of acoustic waves generated from...
In this work, a MEMS infrared source applied to compact Non-Dispersive Infrared (NDIR) gas sensor is reported. Compared to other related things, the source coats integrated nanostructure black silicon compatible with CMOS technique on the poly-silicon. Hence the emissivity is as high as 98% at 3∼5µm wave range; relat ively the radiation efficiency is increased by 40% through calculation. Suspension...
Polymer capacitive humidity sensor with micro heater was fabricated by MEMS (Micro Electro Mechanical Systems) technique. The most suitable input power which can achieve high precision and the low consumption was found. It was demonstrated that intermittent heating of humidity sensitive material reduced the drift at high humidity. This MEMS humidity sensor would be a technology suitable for the applications...
We present the design, simulation, fabrication and characterization of a continuously tunable Omega-ring teratahertz metamaterial. The tunability of metamaterial is obtained by integrating electrothermal actuator where higher tuning range, larger stroke and enhanced repeatability are possible. The maximum achieved tuning range for the resonant frequency is around 0.30 THz for the input power of 500...
In this paper, we report on temperature-stable operation of silica MEMS oscillators on an ovenized fused silica platform. Temperature servo-control circuits are implemented using an on-chip RTD-based temperature sensor and a resistive heater. A wide-range linear analog controller has been implemented to reduce the effective TCF of the fused silica resonator by an order of magnitude. Digital calibration...
A cutting-edge ovenized micromechanical resonator circuit comprised of a double-ended tuning fork (DETF) resonator and serpentine-shaped heaters to enable ultra-low heater power of only 0.47 mW over the entire temperature range (−40°C to 85°C) has been reported for the first time in a low-cost, foundry CMOS-based fabrication platform. The combination of low thermal conductivity materials (i.e., SiO...
This work reports on the design, fabrication, and characterization of the first CMOS-MEMS ovenized micromechanical resonator monolithically integrated with interface circuits while attaining a 100°C effective temperature rise under heating power in a sub-mW range. The key to attaining such low heater power consumption (i.e., high heating efficiency) relies on the combination of low thermal-conductivity...
We present a MEMS-based approach to AC differential scanning calorimetry (DSC) of biomolecules. Based on a MEMS device that integrates microfluidic handling with highly sensitive thermoelectric detection as well as on-chip AC heating and temperature sensing, we perform DSC measurements under temperature modulation. For the first time, this allows MEMS-based AC-DSC detection of liquid biological samples,...
In this paper, novel methods for designing and implementing analogue and digital hardware and software for detecting hydrogen concentration are presented. In the proposed software, by using the benefits of MEMS thermal conductivity sensors, we could calculate hydrogen — air mixture conductivity and consequently measure concentration with using relations between heating power loss and temperature difference...
We present a MEMS-based differential scanning calorimetric (DSC) device combining highly sensitive thermoelectric sensing, on-chip self-calibration, and microfluidic regulation for thermodynamic characterization of biomolecular samples on a minimized scale. The device integrates well-defined microfluidic reaction chambers and utilizes a three-dimensional structure in which a layer of resistive microheaters...
In this work we describe the manufacturing and characterization of patterned surfaces with large spatial contrast in wettability. We find drastic enhancement of pool boiling performance in water. In comparison to a hydrophilic SiO2 surface with a wetting angle of 7°, surfaces combining superhydrophilic and superhydrophobic patterns can quadruple the heat transfer coefficient (HTC). Superhydrophilic...
Micro-heat pipes incorporating advanced wicks are promising for the thermal management of high power density semiconductor and MEMS devices. We report experimental characterization of the heat transfer performance of wicks consisting of dense arrays of superhydrophilic Cu micropost wicks fabricated using electrochemical deposition and controlled chemical oxidation. A very high heat removal capability...
Presbyopia and cataract are increasing concerns in the aging society. Both age-related ailments go along with a loss of ability to accommodate. A new approach to restoring the patients' ability to accommodate is the Artificial Accommodation System which will be implanted into the capsular bag to replace the human crystalline lens. Depending on the actual need for accommodation, the Artificial Accommodation...
Fires and explosions are some of the most difficult environments in which to perform sensing. A technology is reviewed that measures the temperature versus time relationship of such rapid thermal events. It utilizes the dependence of luminescence on the trap populations of dispersed micro- and nano-particles. The thermoluminescence (TL) of various oxide microparticles gives direct information on temperature...
This paper presents a temperature-stable RF MEMS shunt capacitive switch which employs a circular beam geometry. The circular switch reduces the effect of stress changes versus ambient temperature and results in a average pull-in voltage slope of only -55.8 mV/°C from -5-125°C. This novel device is simulated and tested under continuous RF power at 10 GHz. Results show that the non-uniform temperature...
A new MEMS-based shear-stress sensor has been developed for skin-friction measurements in wind tunnel tests. This new sensor design utilizes polysilicon bridges on silicon substrate as heating and sensing elements, greatly simplifying the fabrication process and increases the yield by eliminating the silicon nitride diaphragm and vacuum cavity in conventional MEMS shear-stress sensors. Since the bridge...
Ultrasonic precise bonding for polymer micro joint was studied. Considering shape deviation as the key issue to successful micro bonding, an ultrasonic bonding system was established, which employed 60 kHz ultrasonic transducer that achieved bonding at low amplitude. Adaptive ultrasonic bonding with bonding energy auto-selected was proposed. In this method, continues decreasing pressure was imposed...
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