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In utilizing CMOS-MEMS resonators as mass-sensitive platforms, a uniform temperature distribution on the membrane surface is critical. In this paper, a novel design of CMOS-MEMS resonator with embedded microheater to control the temperature over the sensing layer was successfully designed and characterized. The CMOS-MEMS resonator was fabricated using 0.35 µm CMOS and post-CMOS micromachining process...
A control system to regulate the temperature of the micro hotplate in a MEMS gas sensor is presented. The controlelement, called micro hotplate, is comprised of a micro heater and a temperature sensor, both made with polysilicon, located near each other. This material has a Temperature Coefficient of Resistance (TCR) that is the basis for the design of the temperature controller of the gas sensor...
We present a low power gas sensor system on CMOS platform consisting of micromachined polysilicon microheater, temperature controller circuit, resistance readout circuit and SnO2 transducer film. The design criteria for different building blocks of the system is elaborated. The microheaters are optimized for temperature uniformity as well as static and dynamic response. The electrical equivalent model...
We investigated Joule heating effects on EM in Cu/low-kappa interconnects. The 1-D radiation mainly contributes to Joule heating. The contribution of the 2-D radiation is larger in a smaller area. However, the passive lines in the same layer do not act as a radiation activator but rather as a compounding factor. EM lifetime degradation is remarkable for dense structure due to poor 2-D radiation. High...
This paper reports the design, modeling, fabrication and measurement of a CMOS-compatible surface-micromachined test structure for the determination of the thermal conductivity of thin films based on the Seebeck effect. The Seebeck effect-based temperature sensing is more advantageous for thin film materials with a relatively large Seebeck coefficient, such as lightly doped poly-Si and poly-SiGe....
This paper presents a reliable method for the growth of single-walled carbon nanotubes (SWNTs) at room temperature by using localized heating. A surface micromachining technique is used to create suspended microstructures for good thermal isolation. Pt resistors are integrated as the heating source, and the local growth temperature and electrical field can be controlled by the heater geometry and...
In deep submicron era, to prevent larger amount of SRAM from more frequently encountered overheating problems and react accordingly for each possible hotspots, multiple ideal run-time temperature sensors must be closely located and response rapidly to secure system reliability while maintaining core frequency. This paper presented a method to extract run-time temperature information from multiple...
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