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This work introduced a novelty MEMS pyroelectric infrared detector based on LiTaO3 (LT) crystal with high absorptivity amorphous carbon film layer. The LT crystal is thined and polished to 100um thickness and double mentaled for electical connection which will be suspened upon rectangle cave of silicon substrate with mental ring. Amorphous carbon(a-C) could be produced by magnetron sputtering on the...
A uncooled amorphous silicon (alpha-Si) infrared (IR) detector with novel thermal isolation method has been fabricated and characterized. The unique sandwich IR absorption structure based on polyimide (PI) and bottom metal reflective layer is presented. The fabrication process of the IR detectors is described. The absorption characteristics of the IR detectors have been investigated. The responsivity...
A hybrid approach to fabrication of single tunable infrared detectors for sensing applications is presented. In this approach the detector and IR Fabry-Perot tunable filter are fabricated separately and then bonded together using a flip-chip technique. This approach allows for less stringent processing conditions for both, detector and filter, resulting in the following advantages: (1) the maximum...
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