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In this work, a surface-enhanced Raman scattering (SERS)-active substrate is prepared simply by flame deposition of candle soot and sputtering of a metal layer. On surface of the SERS substrate covered with carbon-metal composite nanoparticles (CNPs), super-hydrophobicity is observed. Subsequently, by rolling a droplet on such a SERS substrate, CNPs can be collected and enriched into the droplet,...
This work introduced a novelty MEMS pyroelectric infrared detector based on LiTaO3 (LT) crystal with high absorptivity amorphous carbon film layer. The LT crystal is thined and polished to 100um thickness and double mentaled for electical connection which will be suspened upon rectangle cave of silicon substrate with mental ring. Amorphous carbon(a-C) could be produced by magnetron sputtering on the...
This work presents a novel type of surface-enhanced Raman scattering (SERS) devices based on nanocone forests. The nanocone forests are fabricated by using a plasma repolymerization technique, which is a simple and parallel approach that has high reproducibility in wafer-level fabrication. The nanocone forest-based SERS devices exhibit an averaged enhancement factor at the order of 3×106, meanwhile,...
Based on the previous work, we continued a study on improving the emissivity of radiation layer and the perfection of release process developed for electrical modulation pulsed MEMS infrared (IR) source used in NDIR gas sensors. Two different fabrication processes of nano-scale silicon forests were produced by reactive-ion etching (RIE) dry etching poly silicon beneath the aluminum wire bonding pad...
In this work, we present a newly titanium-contained periodic amorphous carbon(a-C) composite films by magnetron sputtering process on silicon (100) substrate which has lower intrinsic compressive stress that can be used in electrical modulation pulsed MEMS infrared(IR) source for NDIR gas sensors. The fabrication process, results, performance and results analysis are then carried out.
In this work, a MEMS infrared source applied to compact Non-Dispersive Infrared (NDIR) gas sensor is reported. Compared to other related things, the source coats integrated nanostructure black silicon compatible with CMOS technique on the poly-silicon. Hence the emissivity is as high as 98% at 3∼5µm wave range; relat ively the radiation efficiency is increased by 40% through calculation. Suspension...
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