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Transdermal drug delivery is an important approach due to its advantages of controlled release, easy wiping off, high safety and low degree of side effects. However, the efficiency and success of the drug delivery method is seriously hampered by the incapacity of many drugs to cross the skin at therapeutically useful rates. A microneedle approach can dramatically promote transdermal delivery, especially...
We are introducing an innovative sacrificial surface micromachining process that enhances the robustness of freestanding microstructures and compliant mechanisms. Fabrication of a compliant mechanism using conventional sacrificial surface micromachining results in a non-planar structure with a step between the structure and its anchor. During mechanism actuation or assembly, stress accumulation at...
This paper introduces an innovative sacrificial surface micromachining process that enhances the fabrication of freestanding microstructures and compliant mechanisms. This process eliminates the topography issues related to the fabrication of these microstructures and achieves planarization without using Chemical-Mechanical Polishing (CMP). The process is based on the silicide technology, which is...
We report on the first-ever pristine C60 (fullerene) surface micromachined structures fabricated using an all-dry etch process. These structures are used to measure the C60 thin film MEMS electromechanical properties. These properties indicate that C60 is promising for realizing useful boundary conditions for MEMS resonators, and stiction properties for MEMS and NEMS switch applications. The clamped-clamped...
In this paper nanomachining on aluminum film using an atomic force microscope (AFM) with commercial diamond tip is investigated. To obtain nano scale groove structure, experiments of nanomachining on aluminum films under various machining conditions were conducted. Then the cross sections of the grooves were measured by AFM, which indicates that using diamond tip, deep grooves on the aluminum film...
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