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We are introducing an innovative sacrificial surface micromachining process that enhances the robustness of freestanding microstructures and compliant mechanisms. Fabrication of a compliant mechanism using conventional sacrificial surface micromachining results in a non-planar structure with a step between the structure and its anchor. During mechanism actuation or assembly, stress accumulation at...
This paper introduces an innovative sacrificial surface micromachining process that enhances the fabrication of freestanding microstructures and compliant mechanisms. This process eliminates the topography issues related to the fabrication of these microstructures and achieves planarization without using Chemical-Mechanical Polishing (CMP). The process is based on the silicide technology, which is...
This paper reports a surface micromachined Pirani pressure sensor with superior linearity in atmospheric pressure range. The extremely narrow gap of the device (50 nm) increases the transition pressure of the device up to 300 kPa. When the heater power is kept constant, large change in the gap thermal conductivity at different pressures alters the heater temperature and introduces undesirable nonlinearity...
This paper presents a new undercut compensation etch technique that provides better control over lateral undercutting of polysilicon thin-films using xenon difluoride (XeF2) vapour as the etchant. A significant reduction in the lateral undercutting of polysilicon thin-films was achieved by placing silicon etch buffers beside polysilicon etch samples during the XeF2 etch process. This technique extends...
An innovative Pirani pressure sensor with atmospheric pressure operating range has been fabricated. The sensor's heated element is a polysilicon resistor, which is separated from the substrate (the heatsink) by an equivalent nanometer size gap. By taking advantage of the surface roughness of the polysilicon heater and a simple process, an inexpensive nanometer size gap is formed between the heater...
This paper presents an innovative surface micromachined Pirani pressure sensor with an extreme narrow gap and with atmospheric operating pressure range. By using a very thin layer of sputtered silicon as a sacrificial layer and Xenon Difluoride (XeF2) gas phase etching technique, a 25 nm gap was fabricated between a heated microbridge and the substrate (heatsink). The gas phase etching of the sacrificial...
PURPOSE: Enteroscopy during laparotomy for Peutz-Jeghers syndrome was introduced in our unit in 1987. Its aim is to achieve more complete polyp clearance and thereby reduce the number of subsequent laparotomies for small intestinal polyps. METHODS: All patients with Peutz-Jeghers syndrome who had undergone intraoperative enteroscopy since its introduction into our unit in 1987 were identified. The...
PURPOSE: Enteroscopy during laparotomy for Peutz-Jeghers syndrome was introduced in our unit in 1987. Its aim is to achieve more complete polyp clearance and thereby reduce the number of subsequent laparotomies for small intestinal polyps. METHODS: All patients with Peutz-Jeghers syndrome who had undergone intraoperative enteroscopy since its introduction into our unit in 1987 were identified. The...
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