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Summary form only given. The power dissipated in ion acceleration in the RF sheaths of a capacitively coupled, parallel-plate, symmetric discharge driven at 13.56 MHz has been determined in argon at gas pressures of 0.01, 0.1, and 1.0 torr. Measurements were made over a range of discharge current between 0.01 A and 3.0 A. Total discharge power measurements were also made at the same time. Two methods...
Summary form only given. The RF discharge dissociation in N2 O in a parallel-plate reactor was measured by downstream mass spectrometry. A wide range of gas flows and powers at 10 kHz and 13.56 MHz was used. It was found that the mass 44 signal (N2O+), which is a measure of the amount of undissociated N2O, is a function of the discharge input energy per N2O molecule (eV/N 2O). The amount of dissociation...
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