Summary form only given. The RF discharge dissociation in N2 O in a parallel-plate reactor was measured by downstream mass spectrometry. A wide range of gas flows and powers at 10 kHz and 13.56 MHz was used. It was found that the mass 44 signal (N2O+), which is a measure of the amount of undissociated N2O, is a function of the discharge input energy per N2O molecule (eV/N 2O). The amount of dissociation increases as eV/N2O increases. The primary downstream products are N2 , O2, and NO. A plug flow, rate equation model of the discharge was used to predict the experimental dissociation rates. Rate coefficients for electron impact neutral dissociation, ionization, and dissociative ionization were obtained from a DC, Monte Carlo simulation assuming the time and space averaged value of <e1>E</e1>/<e1>n</e1> in the discharge. The rate equation model also includes reactions among the dissociation products of N2O and species which are synthesized in the discharge and electron-ion neutralization at the electrodes. The predicted values of the downstream product densities vs. eV/N2O agree with the experimental results