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Microelectromechanical system (MEMS) based on-chip resonators offer great potential for sensing and high frequency signal processing applications due to their exceptional features like small size, large frequency-quality factor product, integrability with CMOS ICs, low power consumption etc. In this work, micromachined polysilicon disk resonators exhibiting radial-contour mode vibrations have been...
This paper reports on the first demonstration of single-ended-to-differential and differential-to-differential (S2D and D2D) channel-select filters based on single-layer (SL) and dual-layer-stacked (DLS) AlN contour-mode MEMS resonators. The key filter performances in terms of insertion loss (as low as 1.4 dB), operating frequency (250-1280 MHz), and out-of-band rejection (up to 60 dB) constitute...
A compact multi-band RF front-end architecture is strongly required and a multi-band RF filter bank is a key component for future mobile phones based on cognitive wireless technology. We have developed a novel CMOS-compatible process for the integration of a multi-band filter with LSI. Different modes of AlN/Si composite piezoelectric MEMS resonators, i.e. film bulk acoustic resonators (FBARs) and...
A new more reliable design of micromechanical radial contour mode disk resonator have been demonstrated with the ability to work at UHF range and high quality factor in both vacuum and air and spurious modes free. In addition, this structure is capable to work at higher modes (e.g. second mode) without increasing the insertion loss and therefore lowering Q. These characteristics are achieved because...
This paper shows the first successful combination of dielectrically-transduced 200 MHz resonators with the epi-silicon encapsulation process, and demonstrates a set of important capabilities needed for the construction of CMOS-compatible RF MEMS components. The result shows the resonant frequency of 207 MHz and a quality factor of 6,400. The high fQ (1.2times1012 Hz) makes this encapsulated resonator...
The resonance and nonlinear dynamical properties of micromechanical structures have been harnessed to demonstrate an impacting micromechanical switch with substantially higher switching speed, better reliability (even under hot switching), and lower actuation voltage, all by substantial factors, over conventional RF MEMS switches. The particular resoswitch implementation demonstrated in this work...
In this paper, radio-frequency micro-electro-mechanical systems (RF MEMS) technology and applications are presented. Use of MEMS resonators are described. Circuit's model of RF-receiver using mechanical components and vibrating micromechanical resonator model which is used in RF architecture is presented. Finally, some general conclusions are given in this paper.
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