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IET Micro & Nano Letters > 2015 > 10 > 11 > 633 - 636
IET Micro & Nano Letters > 2015 > 10 > 5 > 272 - 275
IEEE Transactions on Semiconductor Manufacturing > 2011 > 24 > 2 > 358 - 365
OECC 2010 Technical Digest > 676 - 677
IEEE Transactions on Advanced Packaging > 2010 > 33 > 3 > 713 - 721
Journal of Microelectromechanical Systems > 2010 > 19 > 3 > 715 - 717
IEEE Transactions on Plasma Science > 2010 > 38 > 6-2 > 1512 - 1516