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Journal of Microelectromechanical Systems > 2015 > 24 > 4 > 982 - 989
IEEE Transactions on Components, Packaging and Manufacturing Technology > 2013 > 3 > 5 > 783 - 791
Journal of Microelectromechanical Systems > 2015 > 24 > 4 > 982 - 989
IEEE Transactions on Components, Packaging and Manufacturing Technology > 2013 > 3 > 5 > 783 - 791