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The minimal continuous thickness of Mo film was obtained. Microstructure analysis shows the characteristics peak increases sharply and RMS surface roughness reaches its maximum when thickness approaches the minimal continuous thickness. RMS then decreases rapidly.
The present paper addresses the formation and evolution of microstructure and crystal structure of electroplated copper columns. Copper columns of different size have been plated on Au seed layer for a series of periods of time from half an hour to three hours and characterized by Focused Ion Beam (FIB) and XRD. It was found that not only the growth process during plating but also accompanying recrystallization...
Polyimide/silica-alumina (PI/SiO2-Al2O3) hybrid films were prepared via sol-gel process with tetraethoxysilane (TEOS) and aluminum isopropylate (AIP) as inorganic precursors. The presence of SiO2 and Al2O3 inorganic phases and its weight ratio showed a remarkable effect on the microstructure and properties of the polyimide based hybrid films. The chemical structure of hybrid films was analyzed by...
Piezoelectrets made by cross-linked polypropylene (XPP) foam sheet are prepared by hot-stretching process. The microstructure of stretched films is observed by SEM technique. The piezoelectric d33-coefficients of the samples, with various degrees of elongation, are determined by a quasi-static method. The applied pressure dependence of piezoelectric d33-coefficients is investigated. The influence...
Results from an initial study on the preparation, microstructure, and optical and electrical properties of zinc nitride films are presented. Zinc nitride has a lower bandgap than ZnO and can be fabricated in a thin film form by sputtering and other methods. This material has a potential as a new semiconductor material in photovoltaic, optoelectronic and other applications, offering additional advantages...
Microcrystalline silicon films were deposited by very high frequency (VHF) plasma-enhanced chemical vapor deposition (PECVD) with different hydrogen dilution. The microstructure of these films was investigated using Raman spectroscopy and infrared absorption (IR) spectra. The crystalline, amorphous, and grain boundary volume fractions Xc, Xa and Xgb were estimated from Raman measurements. An interface...
The effects of deposition temperature and in-situ post-deposition annealing on the microstructure of co-evaporated Cu(InGa)Se2 thin films and on the performance of the resulting solar cell devices have been characterized. Films were deposited at substrate temperatures of 150??C, 300??C and 400??C. Films were also deposited at these temperatures and then annealed in-situ at 550??C for 10 minutes. In...
The aluminum-induced crystallization and layer exchange process shows great promise for converting a-Si into large-grained poly-Si for solar cell applications. To investigate the relationship between the grain size of Al and the final grain size of poly-Si, a series of samples were deposited by RF magnetron sputtering 165 nm of Al onto SiN/SiO2 coated (100) silicon substrates. The Al grain size was...
Chalcopyrites are important contenders among solar cell technologies due to their direct band gaps and high absorption coefficients. Copper indium gallium sulfide, CuIn1-xGaxS2 (CIGS2) thin films have been grown by sulfurization with copper rich compositions. However, the desired free carrier concentration range of 1016-1017/cm3 can be achieved fairly easily with copper deficient compositions avoiding...
Transparent conducting oxide (TCO) thin film is one of the key components in photovoltaic and display devices. Indium tin oxide (ITO) is the best known TCO material; however, its cost is high. Fluorinated tin oxide is one candidate to replace ITO as a TCO material. It is stable at high temperature, economical to produce and more benign compared to other TCO materials. The bulk resistivity of tin oxide...
A model is proposed to assign the hydrogen complexes in amorphous and nano/microcrystalline silicon to the hydride stretching modes in infrared spectra. We demonstrate that this analysis approach is a helpful tool to characterize the material properties of amorphous and microcrystalline silicon.
This paper reports a room-temperature fabrication process for production of localized regions of highly-loaded carbon nanotube (CNT) networks within the surface layers of polydimethylsiloxane (PDMS). These bilayer micro-structures are formed by electrophoretic deposition (EPD) of CNTs into a patterned mold, followed by a transfer-micromolding step. The fabricated CNTs/PDMS bilayer exhibits flexibility,...
Osmium-ruthenium (OsRu) thin films of different thickness were deposited on porous tungsten (W) pellets in a configuration similar to dispenser cathodes, using two separate sputtering systems. In order to assess which films may best inhibit interdiffusion between the OsRu film and the W substrate during annealing, the grain structure and texture of OsRu films were characterized by x-ray diffraction...
This electronic document Isothermal oxidation kinetics of pure nickel and its lanthanum ion-implanted sample are studied at 900degC. Scanning electronic microscopy (SEM) and transmission electronic microscopy (TEM) are used to examine the surface morphology and microstructure of oxide films. Laser Raman spectrometer and X-ray diffraction spectrometer (XRD) are used to study the stress level in oxide...
The magneto-transport properties of ferromagnetic based multilayers are dependent on the film thickness, the surface roughness, the nature of the interlayer and pining layer used for exchange biasing. We investigate how the nature of the spacer-layer affects the magnetoresistance and Hall effect properties of the magnetic multilayers. The effective thicknesses of the oxide layers were estimated by...
In this paper, the resistivity and temperature coefficient of resistance (TCR) of nanostructured Ta-Si-N thin films fabricated on silicon substrate by reactively cosputtering have been studied. The substrate bias was controlled from 0 to -200 V at a fixed nitrogen flow ratio of 5 FN2% (FN2/ (FN2+FAr) times 100%) to study the electrical properties of different Ta-Si-N films. The Ta-Si-N films with...
A novel piezoelectric microbalance biosensor based on nano-crystalline PZT/quarts is fabricated. Sol-gel method is utilized to bond the PZT thin films on the quartz substrate as the sensing unit. The microstructure and the surface appearance of PZT thin films on quartz substrate and the influence of cancer cells detecting with the sensing unit using PZT/quartz are studied. The XRD and AFM results...
In this study, the nanocomposite Ti-Si-N thin films were prepared by reactive magnetron co-sputtering system. The Ti-Si-N film is a mixed composite consisting of the Ti-Si, Ti-N and Si-N compounds. The TiN phase is polycrystalline while SiNx is amorphous. As Si is added to the Ti-N compound to form Ti-Si-N, the microstructure becomes nanocrystalline grains embedded in an amorphous matrix i.e. nanocomposite...
The dielectric study of HfO2 thin films deposited on the platinized silicon substrate using RF-sputtering deposition technique have been carried out in the metal-insulator-metal (MIM) configuration over a wide temperature (300 to 500 K) and frequency (100 Hz to 1 MHZ) ranges. The film were deposited at pre-optimized sputtering voltage of 0.8 kV, substrate bias of 80 volt and annealing temperature...
Hydrogenated silicon (Si-H) thin films were deposited from a mixture of pure silane (SiH4) and hydrogen (H2) gases in a home-built plasma enhanced chemical vapour deposition (PECVD) system using the layer-by-layer (LBL) deposition technique. The substrate temperature, deposition pressure and radio-frequency (RF) power were maintained at 150degC, 0.8 mbar and 20 W respectively during the deposition...
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