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This paper presents an investigation of two integrated solutions that make a previously developed electrical-only test and calibration procedure, of a MEMS convective accelerometer, realizable on-chip. The idea is to integrate on-chip circuitry that performs all required measurements and evaluates an electrical test parameter on which the test and calibration procedure is based.
Recently, researches for improving the performance of the piezoelectric mass sensors in the applications like detection of biochemical entities, virus particles or human biomarkers have increased drastically. In this article, a piezoelectric cantilevered beam mass sensor is modeled using Finite Element Analysis. The model is validated by comparing the simulation results with the experimental ones...
Microelectromechanical systems production is still an immature technology compared to the classical semiconductor industry. MEMS fabrication and packaging processes may present misalignments which result in an improper placement of the internal microstructures or dies. In this work, the possibilities of diagnosing mechanical misalignments of dual axis IC accelerometers are explored. The used method...
This paper presents sensitivity behavior study and optimization of dual axis CMOS MEMS convective accelerometers using both analytical and FEM techniques. In a first part, newly developed accelerometer 3D model is used in FEM simulations. Using different sizes for micromachined and square cover shapes, it is found that sensitivity readings and its maximum position in cavity are affected by both cover...
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