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The waveform effect on dynamic bias temperature instability (BTI) is systematically studied for both p- and nMOSFETs with ultrathin SiON gate dielectrics by using a modified direct-current current-voltage method to monitor the stress-induced interface trap density. Interface traps are generated at the inversion gate bias (negative for pMOSFETs and positive for nMOSFETs) and are partially recovered...
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