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Wafer-scale, CMOS compatible graphene transfer has been established for device fabrication and can be integrated into a conventional CMOS process flow back end of the line. In Part I of this paper, statistical analysis of graphene FET (GFET) devices fabricated on wafer scale is presented. Device yield is approximately 75% (for 4500 devices) measured in terms of the quality of the top gate, oxide layer,...
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