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This paper presents a frequency-modulated (FM), consumer-grade yaw-rate sensor. The system consists of a custom low-power (160 µA), low-phase-noise (−135 dBc/Hz at 100 Hz offset) integrated circuit (IC), coupled to a novel (930 µm)2 z-axis MEMS sensor fabricated in a 24-µm-thick industrial process. In operation, it shows a ratiometric scale factor of 1.6 Hz/Hz, and a white noise of 8 mdps/√Hz, both...
This paper reports a frequency modulated (FM)/rate integrating MEMS gyroscope where superposed clockwise (CW) and counter clockwise (CCW) modes are independently controlled on a single resonator. A frequency and quality factor mismatch compensation method by adjusting the phases and amplitudes of driving signal is proposed and experimentally demonstrated. The mismatch compensation method proposed...
We demonstrate that direct frequency modulation with a pseudo random bit sequence (PRBS) improves the angle random walk (ARW) and bias instability (BIS) for a laser-driven fiber optical gyroscope over a continuous wave (CW) laser driven gyroscope. The PRBS modulation is shown to improve the ARW to 0.076 deg/hr1/2 and BIS to 2.298 deg/hr compared to an ARW of 0.172 deg/hr1/2 and BIS of 5.862 deg/hr...
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