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Using an optical whispering gallery mode calcium fluoride resonator with 1 cm diameter and 0.2 mm thickness we have demonstrated experimentally a prototype of a passive gyroscope characterized with 0.03 deg/hr1/2 angle random walk and 2 deg/hr bias drift.
This paper presents the in-run bias stability of a high Q-factor Quad Mass Gyroscope (QMG), vacuum sealed with getter activated in Leadless Chip Carrier (LCC) package. Quality factors of 1.2 and 1.1 Million were measured along the layout-defined drive and sense modes. As-fabricated, frequency mismatch of 35Hz was electrostatically tuned to 200mHz, for a device with 2kHz center frequency. A performance...
We report a ∼50PPM precision in-run calibration platform for MEMS gyroscopes. In this work we demonstrate an integrated system capable of extracting instantaneous scale factor, drifts and cross axis sensitivities of the commercial ADXRS646 Z-axis gyroscope, with complete in-run rejection of acceleration sensitivities. The demonstrated method is applicable to any MEMS Coriolis force gyroscopes. The...
This paper demonstrates a silicon resonant accelerometer which consists of a MEMS structure and an ASIC readout circuit. The MEMS sensor is fabricated in an 80-µm thick SOI process with a wafer level vacuum package. For noise reduction, several techniques are employed during the circuit design. And in order to reduce the temperature drift due to self heating, the power consumption is carefully limited...
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