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In this paper we present the recent improvement of a silicon micro-mechanical vibrating beam accelerometer (SVBA) which combine the advantage of low cost of silicon MEMS fabrication technology, small size vacuum wafer level package, low noise low power application-specific integrated oscillation circuit and digital frequency demodulation technology. Under room temperature, it has achieved bias instability...
This paper presents the design, fabrication and preliminary characterization of a new type of multi-axis capacitive accelerometer with sub-µg resolution based on a robust CMOS-compatible 2-gap fabrication technology that can provide large proof-mass (1 mm tall, >2.33 milligram/mm2), high aspect-ratio (HAR) narrow sense gaps (<3 µm wide, >250 µm tall) and large sense/feedback electrode area...
This work demonstrates high-performance in a low-footprint MEMS gyroscopes based on piezoresistive nano-gauge readout. Significant noise reduction can be obtained by increasing the current dissipation in differential nano gauges, each having a (250 nm)2 cross-section. Though the device is fabricated in a low-cost process and operates at relatively large pressures (about 4 mbar), the achievable angle...
In this paper, we present the mechanical sensitivity improvement of a disk resonator gyroscope (DRG) by optimizing the thickness distribution of the nested rings. The mechanical sensitivities of the DRGs with uniform, linearly changing and step changing rings have been simulated. The results suggest that the ring thickness distribution has great influence on the performance of the DRG. Then the optimized...
We report a ∼50PPM precision in-run calibration platform for MEMS gyroscopes. In this work we demonstrate an integrated system capable of extracting instantaneous scale factor, drifts and cross axis sensitivities of the commercial ADXRS646 Z-axis gyroscope, with complete in-run rejection of acceleration sensitivities. The demonstrated method is applicable to any MEMS Coriolis force gyroscopes. The...
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