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This paper presents the design, optimization and simulation of a radio frequency (RF) micro-electromechanical system (MEMS) switch. The device is a capacitive shunt-connection switch, which uses four folded beams to support a big membrane above the signal transmission line. Another four straight beams provide the bias voltage. The switch is designed in 0.35μm complementary metal oxide semiconductor...
Micromachining of micro electromechanical systems such as other fabrication processes has inherent variation that leads to uncertain dimensional and material properties. Methods for optimization under uncertainty analysis can be used to reduce micro device sensitivity to these uncertainties in order to create a more robust design, thereby increasing reliability and yield. In this paper, approaches...
Mobile electronic devices know a flourishing market of highly demanding users who tend towards products with more integrated functions, smaller physical size, and better performance. In these devices, the audio systems are known to have peculiarly poor efficiency. Thus, significant research efforts are currently focused on the improvement of cell phones audio system, and in particular on energy efficiency...
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