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In MEMS industry, silicon-on-insulator (SOI) wafers are gaining ground from blank silicon wafers as the main starting substrate. Tailored SOI wafers available in the market contain for example buried cavities or a buried gettering layer. Adding another layer in addition to the thermal SiO2 insulator, or replacing it with another material altogether, could be a way to tailor the properties of SOI wafers...
We report contraction-expansion array (CEA) microchannels for high-yield blood plasma separation utilizing differential inertial migration. An abrupt change of the cross-sectional area curves fluid streams and accelerates the flow velocity, which induces Dean flow. Utilizing the balance between inertial lift force and Dean drag force, we were able to separate blood plasma from human whole blood with...
In this work, discussing the detection of NH4+ ion based on LAPS with functionalized 2 nm-thick ALD-HfO2 film using RTA and CF4 plasma is demonstrated. The annealing treatment at 500, 700, and 900°C were performed on ALD-HfO2 film and the plasma treatment for 1, 3, and 5 min were performed on ALD-HfO2 film with 900°C annealing. In the results, the response for NH4+ ion detection was decreased with...
MEMS technology development and MEMS manufacturing activities at TSMC are presented. Two models for process development, i.e. customer product/process “phase-in” and internally developed “platform” are discussed. The latter is a TSMC-MEMS platform for motion sensors and other devices.
A photoresist dispense and self-planarization (DSP) approach as a simple and cost-effective photoresist coating method has been exercised on a surface property modified substrate, where the oxygen plasma treatment of a substrate through a shadow mask selectively modifies the open area to a hydrophilic property. The non-plasma-treated area repels the dispensed photoresist while one on the plasma treated...
A hybrid microfluidic separation device that uses the crossflow and the centrifugation effect to separate human plasma from blood cells has been designed and fabricated. The chip mainly consists of the spiral microchannel, which is divided into inner and outer mcirochannels by micropillar arrays. The slits between the micropillars act as filter. Clogging and jamming in this filtration structure are...
An atmospheric pressure low-power, capacitively coupled RF plasma probe was designed and fabricated for selective-area chemical vapor deposition of materials at room temperature. The probe consisted of a gas channel with two electrodes forming a capacitor through the gas and channel wall. An inductor was used to match the capacitive electrodes to 50Ω RF source at 600 MHz. The resulting LC circuit...
We report electrical properties and Optical Emission Spectrum of DC-Driven Microplasma Reactor for Scanning Plasma Etching in pure SF6 environment with different device size between 5–12 kPa gas pressures. The Microplasma Reactor is consists of metal-insulator-metal sandwich structure, and with an inverted pyramidal shape hollow cathode. A diagnostic system is design to measure the V–I curve and OES...
In this paper, the oxygen plasma treated single-walled carbon nanotubes (SWCNTs) were combined with the poly (3,4-ethylenedioxythiophene) / poly (styrenesulfonate) (PEDOT/PSS) solution to prepare the PEDOT/PSS-SWCNTs composite. Effects of the SWCNTs concentration and the alternative current dielectrophoresis (AC-DEP) assembly of the hybrid film on conductive characteristics and gas sensing properties...
We report on the micro-fabrication and characterization of a chip-scale plasma light source based on a Rubidium (Rb) vapor cell. The Rb plasma light source is intended for use as an integrated optical pump-light source in miniature double-resonance Rb atomic clocks [1, 5]. The RF plasma is capacitively coupled using external electrodes, and the light source is impedance matched to the source for frequencies...
In this paper we report on conducting polymer micro-actuators which have been fully patterned using photolithography and plasma dry etching processes. The interpenetrating polymer network (IPN) architecture used in this work allows the interface and adhesion problems, which have been reported in the design of classical conducting polymer-based actuators, to be resolved. Very thin 17 µm actuator films...
PDMS and parylene are among the most widely used polymers in biomedical and microfluidic applications. However, integration of both these materials on a single device has not been possible due to low bond strength achieved using conventional methods. In this paper, we demonstrate plasma-enhanced bonding of PDMS slabs with parylene thin films (from 0.4MPa for PDMS glued assembly to >1.4MPa tensile...
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