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Sigma-Delta-Modulators (SDM) are the most successful technique for analog-to-digital (A/D) conversion, especially for high resolution applications. Similar techniques and architectures have been applied to micro-electro-mechanical systems (MEMS) by incorporating a micromachined sensing element in a SDM force-feedback loop. However, compared to the design of purely electrical SDM there are important...
We developed reaction chamber arrays with a volume of a few femtoliters to monitor biological reactions at single-molecule level. Micro-meter holes were fabricated on the surface of a silicone elastic sheet (PDMS). Sample solutions were sandwiched between the fabricated sheet and a glass surface. Resultantly, solutions were enclosed in each chamber hermetically. The uniformly shaped chambers allow...
After 45 years of unfortunate delay, nanodiamond particles having 4.8±0.7 nm in diameter are now emerging as one of the most promising candidates for a general purpose material in nanotechnology for the reasons of (1) low cost, (2) non-toxicity, (3) high crystallinity, and (4) versatile maneuverability. (1) The raw material is a TNT-based war explosive, once most popular, over-produced but now becoming...
Nanotechnology will allow us to build devices enormously smaller than before and will bring fundamental changes to the disciplines such as engineering, chemistry, medicine, biology, and physics. The research in nano manipulation and nano assembly is tremendously important because most physical magnitudes characterizing nano scale systems significantly differ from those familiar in macro, meso, and...
For electrostatically actuated parallel-plate tunable Microelectromechanical System (MEMS) capacitors in traditional theory, pull-in occurs when the deflection of the movable plate is one-third of the original air gap. In this paper, we fabricated the parallel-plate tunable MEMS capacitors and used WYKO NT1100 optical surface profiler to measure the displacement related with deformation. The results...
Bio-medical engineering attracts lots of attention in an aged society. Especially, micro-nano robotics plays an important role to supply advanced devices and equipments. For example, there is an increasing interest in miniaturization and integration of medical devices by MEMS/NEMS technologies. Recent progress enables us to build manipulators and mobile robots which can work in the body. For minimally...
Cancer and many other diseases are characterized by changes in cell morphology, motion and mechanical rigidity. However, in live-cell-cytology stimulus-induced morphologic changes typically take 10–30 minutes to detect. Here, we employ live-cell-interferometry (LCI) to visualize the instantaneous response of a whole cell to mechanical stimulation, and we detect cytoskeletal remodeling behavior within...
Based on previous experimental results of the Carbon Nanotubes-based (CNTs-based) micro bubble generation in static water presented by our group, the dynamic characteristic of CNTs-based micro bubble will be introduced in this paper. The movement of CNTs-based micro bubble is categorized into two forms: micro bubble transportation in the micro channel driven by aqueous flow induced by the micro pump...
This paper presents the operation principle and development of a micromachined thermal convective accelerometer featured with carbon nanotube (CNT) sensing elements. The operation principle of this accelerometers is based on convection of fluids in a chamber. A DEP deposited CNT bundle creates a symmetrical thermal profile and another two CNT bundles working as thermal detectors are placed on both...
This paper presents multi-category human motion recognition methods based on MEMS inertial sensing data. A micro inertial measurement unit (muIMU) that is 56 mm*23 mm*15 mm in size was built. This unit consists of three dimensional MEMS accelerometers, gyroscopes, a Bluetooth module and a MCU (Micro Controller Unit), which can record and transfer inertial data to a computer through serial port wirelessly...
Telemetry unit for the data and power transmission is a key part of the retinal prosthesis system using to restore vision for the visual impairments. The design of the modulator and demodulator for the telemetry unit plays important roles in determining the performance of the retinal prosthesis system. ASK, FSK and PSK are identified as the most popular modulation schemes. In this paper, we investigate...
A MAG-muIMU which is based on MEMS accelerometers, gyroscopes and magnetometers has been developed for real-time estimation of human hand motions. Appropriate filtering, transformation and sensor fusion techniques are combined in the Ubiquitous Digital Writing Instrument (UDWI) to record the handwriting on any surface. However, because of the sensors' intrinsic biases and random noise such as circuit...
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