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This work demonstrates a novel control strategy for the drive mode of a MEMS gyroscope using ascending frequency drive with AGC-2DOF PID controller instead of resonant frequency drive. It can suppress the electrical coupling from the drive electrodes to the sense electrodes, reduce the low frequency noise and improve the transient response by using 2DOF PID controller. Test results indicate the electrical...
A decoupled lateral-axis TFG (tuning fork gyroscope) with novel driving and sensing combs is presented. The EFBD (electrostatic force balanced comb driver) adopted in the TFG can efficiently suppress the mechanical coupling in a simple manner. The structure of the gyroscope is also optimized to suppress the coupling further. Moreover, torsional sensing combs are adopted to detect the out-of-plane...
In this paper, a bulk micromachined lateral axis TFG (tuning fork gyroscope) with torsional sensing comb capacitors is presented. Both driving and sensing modes of the gyroscope are dominated by slide film air damping, then it can work even at atmosphere. Novel driving comb capacitors are used to electrically decouple the mechanical coupling from sensing mode to driving mode. The process for this...
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