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This paper presents a low-voltage low-power monolithic complementary metal-oxide-semiconductor (CMOS) micro-electromechanical-system (MEMS) accelerometer design. This design utilizes low-voltage design techniques without using low-threshold devices or internal supply voltage boosting. The accelerometer, designed in the 0.18-μm CMOS MEMS process, contains the micro-mechanical structure, readout circuits,...
This paper presents a low-power generic readout circuit for capacitive and resistive complementary metaloxide- semiconductor (CMOS) micro-electro-mechanical-system (MEMS) sensors. This readout architecture can be scaled to even more sensors to achieve chip area and power consumption efficient. An incremental sigma-delta analog-to-digital converter (ΣΔ ADC) is used for providing multiplexed digital...
This paper presents a digital trimming technique for canceling the output offsets caused by sensor mismatches in an accelerometer design. The offset cancellation techniques provide fine trimming steps with higher chip area efficiency compared with that of conventional capacitor array compensation approaches. The accelerometer, fabricated in a 0.18- complementary metal-oxide-semiconductor...
A monolithic inertial sensor based automatic offset calibration technique is proposed in this paper. With this technique, the output offset voltage caused by sensor and amplifier mismatches is trimmed from 600mV down to 50mV from the measurement results. For providing larger dynamic range, a programmable gain control amplifier is included in this architecture. This inertial sensor is implemented by...
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