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Millimeter waves funnel through nano gaps of 0.8–20 nm, 1) creating intensity enhancements of 108, 2) enhancing molecular cross sections by 103, and 3) greatly enhancing nonlinearities and lowering transition temperatures of correlated electron systems. Nano and terahertz technologies have much to offer to each other.
The Smith-Purcell radiation (SPR) in metallic metamaterial grating is studied theoretically. This metallic metamaterial is a one-dimensional array of slits with sub-wavelength period perforated on a perfect metallic film, which supports discrete guided modes in presence of convective electron bunch near its surface. It is also found that SPR intensity is enhanced when guided modes couple with diffraction...
The main objective of this study was to identify if there is any change in wafer warpage after bevel clean process, which might lead to higher film stress at device area in further processes. Correlation between bevel film Etch Rate (ER) and wafer warpage was also investigated. 25 kA thermal oxides (Tox) were etched on back side with various thicknesses remaining to generate a different amount of...
Electrical data of advanced capacitor dielectrics such as Sr-rich (Sr/(Sr + Ti) ~ 62%) strontium titanate (STO), rutile TiO2, which have dielectric constants higher than 60 even with physical thicknesses in the 7-10 nm range are presented. A practical capacitor model is proposed based on planar metal insulator-metal (MIM) system fabricated using 300 mm toolsets to access required capacitor dielectrics...
Lead zirconate titanate piezoelectric films were integrated into prototype one-dimensional array transducers. The geometry used for transducer arrays is a xylophone-bar type with a length:width aspect ratio greater than 5:1 in order to isolate the desired resonance modes. The PZT and remaining films in the stack were patterned using ion-beam etching and partially released from the underlying silicon...
We demonstrate electrical control of terahertz radiation through nanoresonators on VO2 thin film. By electrically induced insulator-to-metal phase transition, terahertz radiation can be switched-off. Transmission is decreased by one order of magnitude even when the film thickness is in nanoscale.
We observe that rectangular holes fabricated in a gold film with a sub-skindepth thickness show blue-shifted resonance frequencies as the width increases. For rectangular holes on a finite substrate its thickness and the hole width are crucial factors determining the resonance frequency.
We study log periodic nanoresonators on VO2 thin film, amplifying available dynamic range for extinction and transmission. Over 1,000:1 extinction ratio for the nano-pattern is achieved when the film undergoes insulator-to-metal phase transition, compared with 10:1 ratio for the unpatterned cases.
We present resonant transmission through rectangular hole array on a metallic film. Transmission spectra broaden with the resonance peaks shifting toward higher frequencies, as the period decreases. The broadening is caused by inter-resonator coupling effects similar to the tight binding model.
A PRAM cell with great scalability and high speed operation capability with excellent reliability below 20nm technology was demonstrated. This has the meaning of the potential applicable to the technology area of scaling limitation of DRAM cell. We fabricated a confined PRAM cell with 7.5nm×17nm of below 4F2. In particular, Sb-rich Ge-Sb-Te phase change material was employed for high speed operation...
The suppression effect on deep level defects and the defect generation in Cu(InGa)Se2 solar cells by a proton implantation have been investigated using deep level transient spectroscopy (DLTS) and optical DLTS measurements. CIGS films with the thickness of ~3μm were grown on a soda-lime glass as substrate by co-sputtering method and implanted by proton with 2× 1016 cm-3 dose and in 50 keV energy,...
Coherent G-mode phonon oscillations in few-layer graphene films were generated using ultrafast pump-probe spectroscopy. The frequency and the decay time were different depending on the thickness of the graphene layers.
Dielectric properties of a water film formed on mica at room temperature, in equilibrium with water vapor at various relative humidities, was studied using terahertz spectroscopy. Structural and dynamical conditions of the adsorbed water film on mica were changed within airtight enclosure in which relative humidity and temperature could be regulative. In this presentation, we discussed the growth...
Silicon carbon nitride (SiCxNy) antireflection (AR) coating layer has been coated using a novel silane-free processs and aparatus for a solid source developed at SiXtron Advanced Materials to eliminate the storage and handling of dangerous pyrophoric silane gas. The electrical and optical properties of the new AR coating layer are investigated and compared with those of SiNx films coated with SiH4...
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