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The localized thermal effect caused by the self-heating effect (SE) becomes important for nanoscale 3-D transistors such as bulk FinFET because the thermal coupling from substrate is critical in such 3-D transistors. In this brief, we analyze the SE in 5-nm bulk FinFETs that are scaled down, following the International Technology Roadmap for Semiconductors. We systematically analyze the impact of...
In this paper, the dual-k spacer of nanowire-FET is investigated using a variety of materials compared with single spacer. The proposed structure shows significant improvement of delay characteristics and better electrostatic controllability than those of single spacer.
In this paper, we have investigated RC delay not only on single channel but also on multi-channels in lateral FET (LFET) and vertical FET (VFET). It has verified that there is always constant for SCEs regardless of the number of channels. Since all structures have the same gate length and spacer length, they have the same gate controllability. On the other hand, RC delay depends on the structure....
Device characteristics in the operating region, subthreshold region, and OFF region were analyzed to propose optimum design guideline for nanowire FET. First, the research was focused on the structure of extension region in perspective of RC delay. Also, Subthreshold Swing (SS) and Gate Induced Drain Leakage (GIDL) were investigated because these characteristics are greatly affected by the structure...
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