In this paper, we have investigated RC delay not only on single channel but also on multi-channels in lateral FET (LFET) and vertical FET (VFET). It has verified that there is always constant for SCEs regardless of the number of channels. Since all structures have the same gate length and spacer length, they have the same gate controllability. On the other hand, RC delay depends on the structure. Because VFET has more parasitic capacitance, it shows poor RC delay. As a result, LFET is more promising than VFET in high performance.