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This paper reports the conception, the fabrication and the electrical testing of an overdamped silicon accelerometer dedicated to vibrating environments. Squeeze-film damping effects are implemented to drastically reduce the mechanical component bandwidth while keeping a satisfactory resolution. Mechanical filtering of vibrations above 3 Hz is expected to strongly lower the mechanical overcharge and...
The electro-mechanical characterization of MEMS diaphragms for acoustic applications is introduced in this paper. The samples under test are fabricated with the 0.35 AMS CMOS process with front-side surface etching post-process. The goals of the experimental activities are to verify the performances and repeatability of fabrication process and to identify the static and dynamic properties of diaphragms...
This paper reports on ultra-scaled single-crystal Si NEMS resonators (25–40nm thick) operating in the 10–100MHz frequency range. Their first monolithic integration at the front-end level with CMOS enables to extract the signal from background leading to possible implementation of direct/homodyne measurement, for high sensitivity sensing applications and portable systems.
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