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A new concept concerning dielectric engineering is presented in this study aiming at a net improvement of the performance of dielectric layers in RF MEMS capacitive switches with electrostatic actuation and an increase of their reliability. Instead of synthesis of new dielectric materials, we have developed a new class of dielectric layers that gain their performance from design rather than from composition...
The proposed approach in this contribution concerns plasma deposition processes for engineering of multifunctional materials. It opens the way for transition from material level of development to system level of applications. This concept is applied for deposition of nanocomposite thin layers comprising a single layer of silver nanoparticles (AgNPs) embedded in silica-like host matrices at a controlled...
We have recently reported on the effect of silver nanoparticles plasma polymerized stack deposited on a polyethylene film preventing charge injection of both polarities under DC field. We investigate here the effects of the size and density of the silver nanograins on the barrier effect for charge injection. Size and density of the nanoparticles, and the surface coverage are controlled through the...
New dielectric-engineering concept is developed intending a net improvement of the performance of dielectric layers under electrical stress. Instead of synthesis of new dielectric materials a new class of dielectric layers that gain their performance from design rather than from composition is established. Two kinds of nanostructured dielectric layers are presented here: (i) silicon oxynitride layers...
Large number of studies describes phenomena associated with space charge build-up in polymeric materials and the incited consequences when high voltage direct current is imposed. Currently, the studies are oriented towards possibilities to minimize this drawback by addition of nanometric size inclusions into the bulk of the polymer material. One alternative approach is to tailor the interface of the...
This work presents a study on the charge injection and control of dielectric charging phenomenon in thin dielectric layers with tailored interfaces. Single layer of silver nanoparticles (Ag-NPs) was deposited on thermally grown SiO2 layer and covered with plasma deposited thin organosilicon SiCO:H layer. Thus, the Ag-NPs layer can be located at different distances from the surface with Ag-NPs representing...
Charges accumulation and injection in dielectric material remains critical because it is related to a lot of applications or issues. A deep understanding of interfaces phenomena is needed, but classical space charges techniques exhibit less resolution than the required one. Atomic Force Microscopy (AFM) because of its sensitivity to electrostatic force and its high resolution (close to nanometer)...
In this work, we demonstrate the excellent charge retention capability of spin-coated Polymethylmethacrylate (PMMA) 200 nm thin films previously charged by atomic force microscopy. In order to elucidate the mechanisms involved in the charge transport and charge storage in PMMA films, the conductivity of 200nm thin PMMA films was analyzed on Metal-Insulation-Metal (MIM) structures. A wide range of...
This work presents results from a study of thin dielectric layers organized in a structure that behaves as an unified layer with gradual properties. A better understanding of dielectric charging phenomena is aimed at in order to control the conductive properties of the multi-layer system. We first characterize each mono-layer deposited singly on a substrate before the characterization of our multi-layer...
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