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Traditionally, automatic design rule correction (DRC) problem is modeled as a linear program with technology rules and design intents modeled as difference constraints under a minimum perturbation objective. However, these linear programs are often infeasible due to conflicts arising from rules and intents, lack of space or due to incomplete modeling. It is then required to identify problematic constraints...
Traditionally, automatic design rule correction (DRC) problem is modeled as a Linear Program (LP) with design rules as difference constraints under minimum perturbation objective. This yields Totally Uni-Modular (TUM) constraint matrices thereby guaranteeing integral grid-compliant solutions with LP solvers. However, advanced technology nodes introduce per-layer grids or discrete tracks that result...
This paper presents the results obtained from an experimental study of the impact of modern process technologies on the electrical parameters of interconnects. Variations in parasitic capacitances and resistances due to dummy metal fills, chemical mechanical polishing, multiple thin inter-layer dielectrics and trapezoidal conductor cross-sections are presented. Accurate variations in the parasitics...
Accurate extraction of parasitics is an important pre-cursor to timing and signal integrity analysis. In deep sub-micron technologies, the interconnect cross-section areas of metal at various points in a layer are no longer the same -the metal can be etched differently with varying width and spacings and/or the top-surface of the interconnect layer may be non-planar due to chemical mechanical polishing...
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