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This paper describes the development and experimental evaluation of a microelectromechanical system vibratory gyroscope using an optimized double closed-loop control strategy. An automatic gain control self-oscillation interface is used to resonate the gyroscope in the drive mode; the sense mode is controlled by a sixth-order continuous-time and force-feedback band-pass sigma-delta modulator. The...
This paper reports a novel design for electrostatic microgrippers. The new structure utilizes rotary comb actuators to solve the pull-in problem of microgrippers during large displacement manipulation and therefore avoids the widely used conversion systems which necessitate a high driving voltage. The gripper is fabricated using a SOI process with a 60 μm structural layer. Test results show the gripper...
In the paper a newly developed fuzzy adaptive Kalman filter (FAKF) algorithm is presented which is applied in miniature attitude and heading reference system (AHRS) based on MIMU/magnetometers. The method is to deal with time variable statistic of measurement noise in different working conditions. By monitoring the innovation of sensors data in realtime, the Kalman filter tunes the measurement noise...
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