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Retention characteristics of a 3-D NAND flash cell with tube-type poly-Si body are investigated at a high temperature (T) depending on program (P), neutral (N), and erase (E) states of adjacent cells. The trap density (Nt) in the nitride storage layer of the cell is extracted by utilizing retention model and deriving related equations in cylindrical coordinate. By programming or erasing adjacent cells,...
In 3D stacked NAND flash memory, the number of stacked layers tends to increase for high density storage capacity. With the increase of the height of devices, it is important to achieve a good vertical etch profile by which word line (WL) gate dimensions are affected. In this paper, we investigate the effect of the variation of gate dimensions on the program characteristics in 3D NAND flash memory...
Higher sensing margin and longer retention time are critical issues for commercializing 1T DRAM. In this paper, we propose a body-raised double-gate structure to improve sensing margin and retention time of 1T DRAM and confirm the improvements through 3D simulation. This structure shows about 20% higher sensing margin than the planar structure. We have achieved longer retention time by using high...
We have proposed cone SONOS memory structure previously. The point of the structure is field concentration effect in two directions. Among the two, concentration of source to drain direction is critical in program operation. Simulation result shows the shape of narrow drain leads to great memory performance. Fabricated structure shows the same results. In this report, simplified program simulation...
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