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A capacitive pressure sensor was realized by using low-temperature co-fired ceramic (LTCC) materials and technology. The paper will present the design considerations of a sensing element, and compares the experimental data to the theoretical design, with the aim to improve the sensor's characteristics. Special points of attention are the linearity, the temperature behaviour, the pressure media and...
In this paper we present some results of our investigation of a thick-film piezoresistive LTCC-based pressure sensor aimed at applications in the low-pressure range. A series of test sensors was manufactured and characterized. Among the experimental tests the numerical analyses were performed to show the trends and to help reveal the impact of some design parameters. The sensor's resolution, linearity,...
In the frame of a bilateral project Romania-Slovenia (partners: University ??Politehnica?? of Bucharest and ??Jozef Stefan?? Institute from Ljubljana) a capacitive pressure sensor with air using LTCC (low temperature co-fired ceramic) and thick-film materials and technologies was developed. After establishing the optimal dimensions from the point of view of the sensitivity as well as costs, question...
The object of the paper is a pressure sensor realized in thick-film technology developed at ldquoJozef Stefanrdquo Institute. This pressure sensor is also the object of a common project which has the goal to optimize the sensor design acting mainly on layout parameters. Some of the sensor parameters are determined by the LTCC process, for instance the thickness of diaphragm whose thickness is a multiple...
In recent years there was a raising interest in capacitive sensors. Their rate on today's sensor market is steadily rising due to the decreasing of the technology cost, their stability and the employment of simple conditioning circuits interfacing. These sensors can be used to measure a wide variety of physical quantities: flow, pressure, liquid level and others. The capacitive pressure sensors this...
This paper is focused on three different types of ceramic pressure sensors for the use in low-energy-consumption applications. We investigated the design issues for low energy consumption of sensing elements and compared the results and other sensors' characteristics for three different types of thick-film pressure sensors. The first type is the capacitive sensor, which is based on changes to the...
Different piezoelectric materials can be used in micro-electro-mechanical systems (MEMS) for transducers i.e. actuators and sensors of mechanical quantities. Lead zirconate titanates (PZTs) are the most common ceramic materials used as piezoelectric transducers. The ceramic MEMS are made by LTCC (low temperature cofired ceramic) and thick-film technology. They have been extensively used due to their...
This work is focused on pressure sensors designed as a ceramic capsule consisting of a circular edge-clamped deformable diaphragm, which is bonded to the rigid ring, and the ring is fixed on the base substrate. These three elements form the cavity of the pressure sensor. The capacitive pressure sensor is based on changes of the capacitance values between two electrodes. One thick-film electrode is...
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