The Infona portal uses cookies, i.e. strings of text saved by a browser on the user's device. The portal can access those files and use them to remember the user's data, such as their chosen settings (screen view, interface language, etc.), or their login data. By using the Infona portal the user accepts automatic saving and using this information for portal operation purposes. More information on the subject can be found in the Privacy Policy and Terms of Service. By closing this window the user confirms that they have read the information on cookie usage, and they accept the privacy policy and the way cookies are used by the portal. You can change the cookie settings in your browser.
A simulation platform was established to evaluate device performance affected by ion implantation angle variation. Modeling of a one-dimensional wafer scanning system was performed to estimate the angle variation. Process simulation for fin field effect transistors (FinFET) revealed that twist angle affects dopant dose retention in the fin structure. However, the fin structure twists as the arm holding...
In order to achieve high performance finFET devices, it is important to achieve a high concentration and conformal doping within the Fin. In this paper, a solution for conformal finFET doping method is demonstrated. We present a novel implantation condition called Integrated Divergent Beam (IDB) that consists of various implant angle distribution. We perform the IDB Arsenic implantation by Monte-Carlo...
Multiple-gate FETs such as FinFETs would be adopted at the 22nm technology generation and beyond, owing to the better control of short-channel effects (SCEs) in high-volume manufacturing. In this paper, we present a novel implantation mode called “FlexScan” that consists of a series of various rotated angles. We perform the implant with FlexScan mode by Monte-Carlo simulation. FlexScan shows more...
In order to improve the imaging quality of conventional laser photography, this study proposes a new system for colored pulse laser photography to obtain high speed color microscopic imaging. Based on the RGB synthesis technique, three channels of red, green, and blue images are acquired from three cameras with three independent laser light sources. Then, a high quality color image can be obtained...
Based on the RGB synthesis technique, a novel colored pulse lasers photography is designed for high speed imaging. A high quality color image can be acquired by assembling the three channels of red, green, and blue images which are acquired from three cameras with three independent laser light sources.
Set the date range to filter the displayed results. You can set a starting date, ending date or both. You can enter the dates manually or choose them from the calendar.