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This paper presents a system consisting of an array of thin-film microphone channels on glass, which can be formed on large substrates. Each microphone channel consists of a polyvinylidene difluoride (PVDF) piezoelectric transducer as well as amplifier and scan circuits basedon amorphous-silicon (a-Si) thin-film transistors (TFTs). The scan circuits multiplex signals from multiple channels to a CMOS...
This paper presents a system consisting of an array of thin-film microphone channels on glass, which can be formed on large substrates. Each microphone channel consists of a polyvinylidene difluoride (PVDF) piezoelectric transducer as well as amplifier and scan circuits based on amorphous-silicon (a-Si) thin-film transistors (TFTs). The scan circuits multiplex signals from multiple channels to a CMOS...
Thin-film MEMS bridges as micro-resonators have proven attractive for various sensing applications (acceleration, mass, chemical, pressure, etc.) by using frequency shift as a basis for sensing [1]. Low-temperature processing of amorphous-silicon (a-Si:H) enables low-cost fabrication of high-Q MEMS bridges having excellent compatibility with CMOS post processing. However, the a-Si:H bridges have weak...
A low-insertion-loss V-band CMOS bandpass filter is demonstrated. The proposed filter architecture has the following features: the low-frequency transmission-zero (omegaz1) and the high-frequency transmission-zero (omegaz2) can be tuned by the series-feedback capacitor Cs and the parallel-feedback capacitor Cp, respectively. To reduce the substrate loss, the CMOS process compatible backside inductively-coupled-plasma...
Describes the first engineering MOSFET effective-mobility model covering the temperature range 60-300 K which is important for low-temperature CMOS applications. The experimental data obtained using the split C/V method clearly demonstrate the deviations from the universal dependence of the effective mobility mu on the effective vertical field E/sub eff/ at low temperatures. The model presented in...
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