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We present for the first time a fully functional 40 nm perpendicular STT-MRAM macro (1 Mb, ×32/×64 IO) embedded into a foundry standard CMOS logic platform. We achieved target design specifications of 20 ns read access time and 20–100 ns write cycle time without redundancy repair at standard core and IO voltages. The full 1 Mb macro can be switched reliably with write pulse as short as 6 ns, which...
We systematically investigated the impact of R and C scaling to 7nm node (N7) by accounting for FEOL and BEOL holistically. Speed-power performance of plainly scaled N7 turns out to be degraded compared to previous node. BEOL wire resistance (Rwire) multiplied by logic gate input pin cap (Cpin), Rwire×Cpin, is identified as a major limiter of performance and power at N7. Reducing Cpin is crucial to...
With continuous scaling of Complementary Metal Oxide Semicondutor (CMOS) device dimensions, traditional inter-level dielectrics have be replaced by low-k materials, because of the advantages of ultra low-k material such as lower parasitic capacitance, lower cross talk effects, and lower RC delay. The new material in integrated circuits (IC) makes physical failure analysis (PFA) more challenging. This...
We systematically investigated the impact of R and C scaling to 7nm node (N7) by accounting for FEOL and BEOL holistically. Speed-power performance of plainly scaled N7 turns out to be degraded compared to previous node. BEOL wire resistance (Rwire) multiplied by logic gate input pin cap (Cpin), Rwire×Cpin, is identified as a major limiter of performance and power at N7. Reducing Cpin is crucial to...
A cost competitive 20nm technology node is described that enabled industry-first 20nm cellular modem chip with 2× peak data rates vs 28nm, and 2× carrier aggregation. Process and design enhancements for layout context optimization, and continuous process improvements resulted in 18% boost in circuit performance while simultaneously achieving >30% power reduction. 3 mask local interconnect and 64nm...
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