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In MEMS technology there is an increasing interest in developing high aspect ratio silicon columns having rounded corners, slightly positive tapered shaft, sharp tips, and smooth surface. A precise control of the profile can be used for different applications, such as for molds used in polymer hot embossing processes, micro needles used for drug delivery and blood sampling, and neural probes used...
Ultra high aspect ratio microelectrodes are designed and fabricated to record and stimulate neural signals from deeper areas of the brain and nerves and also to provide a new research tool to the neuroscience community. We present a fabrication process to build ultra high aspect ratio silicon based microelectrode arrays for the neural applications. The mu-wire electrical discharge machining (mu-WEDM)...
The lack of safe, reliable, automated and clinically acceptable blood sampling has been the main problem impeding the development of real-time systems for blood analysis and subsequent closed-loop physiological function control. A key component of a real-time implantable blood sampling microsystem is a microneedle array which directly interfaces with the electronics and tissue. The primary motivation...
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