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Cu(In,Ga)Se 2 or CIGS thin films with NaF precursor are grown on Mo coated soda-lime glass (SLG) substrates using a molecular beam deposition (MBD) technique. The growth characteristics of the CIGS films deposited using the 3-stage process are examined by interrupting the deposition process at the end of each stage and the transition temperature at the beginning of the second stage. The evolution...
This innovative pH-ISFET sensor used nanocrystalline-AlN thin film as ion-sensitive membrane which prepared by reactive gas-timing r.f. magnetron sputtering without heating substrate and post annealing. The technique of gas-timing r.f. magnetron sputtering purposed by us, the feeding gas is on-off controlled periodically in such a way that the deposited AlOxNy film has a quite stable composition of...
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