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We present an electrostatic MEMS scanner for a dual-axes confocal fluorescence endomicroscope to collect fluorescent images in three orthogonal planes of tissue with large field of view (FOV) at high frame rate. The scanner employs a novel lever-based dual-gimbal structure to perform coupling-free switchable XY/XZ/YZ two-dimensional (2D) beam scanning, and uses the parametric resonance excitation...
In this paper, we present a two-dimensional (2D) electrostatically actuated Micro-Electro-Mechanical System (MEMS) resonant microscanner for a miniature dual axes confocal fluorescence endomicroscope with an outer diameter (OD) of 5 mm, in which the scanner will be used to achieve a large field of view (FOV) in real-time for en-face imaging. The device has a compact and robust gimbal structure design,...
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